FILM SURFACE RESISTANCE MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To simplify film surface resistance measuring technique to be easily measurable.;SOLUTION: Two of four probe pins prepared on a square, which are on the opposite two sides of the square, are connected electrically (see Fig. 2) to wire so as to be measurable the film surface resistance.;COPYRIGHT: (C)2007,JPO&INPIT