INSTRUMENT AND METHOD FOR MEASURING VOLUME RESISTANCE AND SURFACE RESISTANCE AND INSTRUMENT AND METHOD FOR MEASURING RESISTANCE

摘要

PROBLEM TO BE SOLVED: To provide an instrument and method for measuring volume resistance and surface resistance by which the in-plane resistance distribution of an object to be measured can be grasped through simple operation by measuring the volume and surface resistances of minute portions of the object and which are improved in measuring accuracy by eliminating the influences of absorbing currents.;SOLUTION: The instrument 10 for measuring volume resistance and surface resistance is provided with two spherical electrodes 11 and 12 which are brought into contact with one surface 1a of a belt 1 to be measured, a shaft electrode 13 which is brought into contact with the other surface 1b of the belt 1, and a voltage source 14 which applies a voltage across required electrodes. The instrument 10 is also provided with a current measuring means 15 which measures the current flowing through the section of the belt 1 between the electrodes when the voltage is applied across the electrodes. The spherical electrode 11 and shaft electrode 13 are offset from each other by an arbitrary distance so as to form a pair of volume resistance measuring electrodes and the spherical electrodes 11 and 12 are offset from each other by an arbitrary distance so as to form a pair of surface resistance measuring electrodes. In addition, the instrument 10 is also provided with a switch which can switch the electrodes across which the voltage is applied from the voltage source 14 to the volume resistance measuring electrodes or surface resistance measuring electrodes.;COPYRIGHT: (C)2003,JPO