BENDING VIBRATION TYPE PIEZOELECTRIC VIBRATION CHIP, TUNING FORK TYPE PIEZOELECTRIC VIBRATOR, AND ANGULAR SPEED DETECTION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a bending vibration type piezoelectric vibration chip capable of reducing a residual stress after forming electrode layers and substrate metal layers and suppressing increase of a CI value, a tuning fork type piezoelectric vibrator using it and an angular speed detection sensor.;SOLUTION: Since the substrate metal layers 20A, 20B are formed of nickel having a smaller residual stress than chrome, even if a mechanical stress is applied to a substrate 2 and the electrode layers 30A, 30B by bending vibration, increase of the CI value can be suppressed. Since the substrate metal layers 20A, 20B are formed of nickel having lower diffusion speed than chrome, a phenomenon is reduced, wherein nickel is diffused into the electrode layers 30A, 30B formed of gold and thereby the substrate metal layers 20A, 20B are thinned. Consequently, if nickel is used for the substrate metal layers 20A, 20B, even if a mechanical stress is applied to the substrate 2 and the electrode layers 30A, 30B by the bending vibration, adhesiveness between the substrate 2 and the electrode layers 30A, 30B can be secured.;COPYRIGHT: (C)2007,JPO&INPIT