MICRO MECHANICAL DEVICE, MICRO SWITCH, VARIABLE CAPACITY CAPACITOR, HIGH FREQUENCY CIRCUIT AND OPTICAL SWITCH

摘要

PROBLEM TO BE SOLVED: To provide a micro mechanical device, a micro switch, a variable capacity capacitor, a high frequency circuit and an optical switch capable of restraining malfunction.;SOLUTION: This micro mechanical device comprises a first piezoelectric driving actuator 10A having a piezoelectric film 21, lower part electrodes 22A, 23A and upper part electrodes 22B, 23B to sandwiching the piezoelectric film 21 and a supporting film 25 to support the piezoelectric film 21 and extending to a first working part from a first fixed part 12 fixed on a substrate 11, and a second piezoelectric driving actuator 10B provided on the first working part of the first piezoelectric driving actuator 10A and extending to a second working part with a connecting part with the first piezoelectric driving actuator 10A as a fixed part. The second piezoelectric driving actuator 10B is formed shorter than the first piezoelectric driving actuator 10A.;COPYRIGHT: (C)2007,JPO&INPIT