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Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
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机译:微机械装置,微开关,可变电容器高频电路和光开关
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摘要
A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.
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