Method of forming the embedded sealed cavity in low temperature co-fired ceramic

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a buried type hole or channel in a low-temperature calcinated ceramic.;SOLUTION: The method for forming a low-temperature calcinated ceramic (LTCC) device includes the formation of a channel in a first LTCC tape layer. A wax is inserted into the channel. The wax is one type to be burned out at a lower temperature than a sintering temperature for the first LTCC tape layer. At least one second LTCC tape layer is stuck on the first LTCC tape layer to form a stack. The stack is sufficiently pressed to laminate the first and second layers. The laminated layers are calcinated at a sintering temperature to form a ceramic sturcture sintered from the first and second LTCC tape layers, and all or almost of the wax is burned out and removed from the channel.;COPYRIGHT: (C)2004,JPO