The production mannered null treatment chamber of the vertical die thermal treatment equipment and

摘要

PROBLEM TO BE SOLVED: To prevent a by-product from being adhered to an inner wall surface of a manifold.;SOLUTION: A vertical heat treatment apparatus includes a process tube 11 having an inner tube 13 for forming a treating chamber 14, and an outer tube 12 surrounding the tube 13 and installed in a vertical form, a heater unit 35 for heating the chamber 14, and the manifold 16 connected to an exhaust tube 18 for exhausting the chamber 14, and a gas inlet tube 20 for supplying gas to the chamber 14. A sealing flange 21 is interposed between the tube 12 and the manifold 16. A sealing ring 24, a cooling water passage 25, a heat insulating layer 33, and a heat conduction ring 32, are provided at the flange 21.;COPYRIGHT: (C)2004,JPO