Thin film formation device and thin film formation manner, production device of production device of circuit pattern and production manner and electronic equipment, and resist pattern of circuit pattern and production manner of resist pattern

摘要

P To provide a thin-film-forming apparatus and a thin-film-forming method that can easily and efficiently prepare a superfine pattern, a manufacturing apparatus for a circuit pattern and a manufacturing method for a circuit pattern and electronic equipment and a manufacturing apparatus of a resist pattern and a manufacturing method of a resist pattern. PSOLUTION: A thin-film-forming apparatus 1 forms a thin film by coating a substrate SUB with a coating liquid L, and has a movement mechanism 4 for placing the substrate to move the substrate in a first direction and a second direction crossing the first one, a first droplet discharge head 2 for discharging the coating liquid onto the substrate that is moved in the first direction by the movement mechanism, a second droplet discharge head 3 for discharging the coating liquid onto the substrate that is moved in the second direction by the movement mechanism and a control section C for controlling the movement operation of the movement mechanism and the discharge of the coating liquid in the first and second droplet discharge heads. PCOPYRIGHT: (C)2003 and JPO