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SEMICONDUCTOR MEMORY DEVICE HAVING HIGH ELECTRICAL PERFORMANCE AND MASK AND PHOTOLITHOGRAPHY FRIENDLINESS
SEMICONDUCTOR MEMORY DEVICE HAVING HIGH ELECTRICAL PERFORMANCE AND MASK AND PHOTOLITHOGRAPHY FRIENDLINESS
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机译:具有高电性能和掩模和照相照相法的半导体存储器
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摘要
A semiconductor memory device includes a plurality of rows, each row comprising a plurality of active regions arranged at a pitch wherein the active regions in adjacent rows are shifted with respect to each other by one half of the pitch, wherein a distance between each active region in a row is equal to a distance between active regions in adjacent rows.
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