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Magnetostactic wave device based on thin metal films, method for making same and application to devices for processing microwave signals

机译:基于金属薄膜的静磁波装置及其制造方法及其在微波信号处理装置中的应用

摘要

The integrated magnetostatic wave device comprises a substrate (1), a conductive ferromagnetic thin film (2) of thickness lying in the range about 250 nm to 450 nm and preferably being equal to about 300 nm, said thin film (2) being deposited on said substrate (1), a first transducer antenna (10) for receiving microwave electrical signals disposed parallel to said ferromagnetic thin film (2) in the vicinity thereof in order to create magnetostatic waves or spin waves in said material by inductive coupling, and a second transducer antenna (20) for transmitting microwave electrical signals disposed parallel to said ferromagnetic thin film (2) in the vicinity thereof in order to be inductively coupled thereto and in order to deliver microwave electrical signals on the arrival of a magnetostatic wave in the ferromagnetic thin film (2), said second antenna (20) being situated on the same side of the ferromagnetic thin film (2) as the first antenna (10) so as to be essentially coplanar therewith.
机译:集成静磁波装置包括衬底( 1 ),厚度在约250nm至450nm范围内并且优选相等的导电铁磁薄膜( 2 )。大约300nm左右,所述薄膜( 2 )沉积在所述基板( 1 )上,用于接收的第一换能器天线( 10 )平行于所述铁磁薄膜( 2 )在其附近布置的微波电信号,以通过感应耦合在所述材料中产生静磁波或自旋波,以及第二换能器天线( 20 )用于传输在其附近平行于所述铁磁薄膜( 2 )布置的微波电信号,以便与其感应耦合,并在到达时传送微波电信号。铁磁薄膜( 2 )中的静磁波,所述第二天线( 20 )位于铁磁薄膜的同一侧m( 2 )作为第一天线( 10 ),以便与之基本共面。

著录项

  • 公开/公告号US2006292704A1

    专利类型

  • 公开/公告日2006-12-28

    原文格式PDF

  • 申请/专利权人 MATHIEU BAILLEUL;CLAUDE FERMON;

    申请/专利号US20030532898

  • 发明设计人 MATHIEU BAILLEUL;CLAUDE FERMON;

    申请日2003-10-27

  • 分类号H01L21/00;H01L29/94;

  • 国家 US

  • 入库时间 2022-08-21 21:03:12

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