Method in the fabrication of a monolithically integrated vertical device on an SOI substrate

摘要

A method in the fabrication of a monolithically integrated vertical device on an SOI substrate comprises the steps of providing an SOI substrate including, from bottom to top, a silicon bulk material, an insulating layer, and an monocrystalline silicon layer; forming an opening in the substrate, which extends into the bulk-material, forming silicon oxide on exposed silicon surfaces in the opening and subsequently removing the formed oxide, whereby steps in the opening are formed; forming a region of epitaxial silicon in the opening; and forming a deep trench in an area around the opening, whereby the steps in the opening are removed.