首页> 外国专利> SYSTEMS AND METHODS FOR FABRICATING BLANKS FOR MICROSTRUCTURE MASTERS BY IMAGING A RADIATION SENSITIVE LAYER SANDWICHED BETWEEN OUTER LAYERS, AND BLANKS FOR MICROSTRUCTURE MASTERS FABRICATED THEREBY

SYSTEMS AND METHODS FOR FABRICATING BLANKS FOR MICROSTRUCTURE MASTERS BY IMAGING A RADIATION SENSITIVE LAYER SANDWICHED BETWEEN OUTER LAYERS, AND BLANKS FOR MICROSTRUCTURE MASTERS FABRICATED THEREBY

机译:通过对夹在外层之间的辐射敏感层进行成像来制造微结构主料坯的系统和方法,以及由此制造的微结构主料坯

摘要

Microstructures are fabricated by imaging a microstructure master blank that includes a radiation sensitive layer sandwiched between a pair of outer layers, on an imaging platform, to define the microstructures in the radiation sensitive layer. At least one of the outer layers is then removed. The microstructures that were defined in the radiation sensitive layer are developed. The radiation sensitive layer sandwiched between the pair of outer layers may be fabricated as webs, to provide microstructure master blanks.
机译:通过在成像平台上对包括夹在一对外层之间的辐射敏感层进行成像的微结构母坯进行成像来制造微结构,以定义辐射敏感层中的微结构。然后去除至少一层外层。开发了在辐射敏感层中定义的微结构。可以将夹在一对外层之间的辐射敏感层制成网状物,以提供微结构母坯。

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