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Method and structure for ridge waveguide quantum cascade laser with p-type overgrowth
Method and structure for ridge waveguide quantum cascade laser with p-type overgrowth
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机译:具有p型过生长的脊形波导量子级联激光器的方法和结构
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摘要
The performance characteristics of ridge waveguide QCL may be improved in accordance with the invention by replacing the insulating dielectric layers such as SiO2, Si3N4 or SiC with p-type InP overgrowth layers as well as p-type AlInAs or InGaAsP overgrowth layers, for example.
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机译:根据本发明,可以通过代替绝缘介电层例如SiO 2 Sub>,Si 3 Sub> N 4 Sub来改善脊形波导QCL的性能特性。 >或具有p型InP过度生长层以及p型AlInAs或InGaAsP过度生长层的SiC。
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