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Method for electron beam-initiated coating for application of transmission electron microscopy
Method for electron beam-initiated coating for application of transmission electron microscopy
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机译:用于透射电子显微镜的电子束引发涂层的方法
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摘要
A method for preparing a specimen for application of microanalysis thereto includes forming an initial conductive layer over a defined area of interest on a semiconductor substrate, the initial conductive layer formed through an electron beam deposition process. A volume of substrate material surrounding the area of interest is removed, thereby forming the specimen, including said area of interest and said initial conductive layer over the area of interest. The specimen is then removed from the bulk substrate material.
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