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Semi-insulating GaN and method of making the same

机译:半绝缘的GaN及其制备方法

摘要

Large-area, single crystal semi-insulating gallium nitride that is usefully employed to form substrates for fabricating GaN devices for electronic and/or optoelectronic applications. The large-area, semi-insulating gallium nitride is readily formed by doping the growing gallium nitride material during growth thereof with a deep acceptor dopant species, e.g., Mn, Fe, Co, Ni, Cu, etc., to compensate donor species in the gallium nitride, and impart semi-insulating character to the gallium nitride.
机译:大面积,单晶半绝缘氮化镓,可用于形成用于制造电子和/或光电应用GaN器件的衬底。通过在生长的氮化镓材料的生长过程中向其掺杂深的受主掺杂剂物种(例如Mn,Fe,Co,Ni,Cu等)以补偿施主物种中的施主物种,可以轻松形成大面积,半绝缘的氮化镓。氮化镓,并赋予氮化镓半绝缘特性。

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