DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURED THEREBY, COMPUTER PROGRAM FOR PERFORMING THE METHOD, LITHOGRAPHIC APPARATUS, ROBOTICS SYSTEM AND A TIME OPTIMAL SETPOINT GENERATOR

摘要

ABSTRACTDevice Manufacturing Method, Device Manufactured Thereby, Computer program for performing the method, Lithographic Apparatus, Robotics system anda time optimal setpoint generatorThe invention relates to a device manufacturing method comprising the stepsof:- providing a radiation beam using a radiation system;- projecting the radiation beam onto a substrate of radiation sensitive material;- specifying a trajectory comprising a position and/or an orientation as a function of time to be followed by the substrate relative to the radiation beam, wherein the trajectory is a mathematical smooth function up to at least the third order which connects a first state and a second state, wherein both the first state and the second state comprise boundary values for at least the position and/or the orientation and forfirst and second derivatives of the position and/or orientation.Furthermore, the invention relates to a lithographic apparatus arranged for performing the method, and a software program arranged for performing the method. The invention also relates to a robotics system arranged for specifying a trajectory to be followed between two elements of the system.Fig. 1