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METHOD FOR DETERMINING THE ABSOLUTE THICKNESS OF NON-TRANSPARENT AND TRANSPARENT SPECIMENS BY USING CONFOCAL METROLOGY

机译：共焦法测定非透明和透明样品的绝对厚度的方法

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摘要

The invention relates to a method for determining the absolute spatially resolved double-sided topography and thickness of specimens using two opposite confocally working microscopes. After the unit has been calibrated, the topography of the specimen is measured on both sides of the specimen, is added and the calibration plane is subtracted. The invention also relates to a device for carrying out the method.

机译：本发明涉及一种使用两个相对的共焦工作显微镜确定样品的绝对空间分辨的双面形貌和厚度的方法。校准单元后，在样品的两侧测量样品的形貌，将其相加，然后减去校准平面。本发明还涉及用于执行该方法的设备。

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公开/公告号WO2006119748A1

专利类型
公开/公告日2006-11-16

原文格式PDF
申请/专利权人 NANOFOCUS AG;WEBER MARK A.;
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申请/专利号WO2006DE00806
发明设计人 WEBER MARK A.;
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申请日2006-05-11
分类号G01B11/06;G01B11/02;G01B11/30;G02B21/00;
国家 WO
入库时间 2022-08-21 20:52:10

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