APPARATUS FOR MEASURING LIGHT INTENSITY OF EXCIMER LAMP

摘要

to emit light at a center wavelength of 172 to measure the light intensity of a xenon excimer lamp , compact and cheap provides a light intensity measuring device . ; preferably a photodiode photoelectric conversion element as a light intensity measuring device according to the present invention is the range of 800 ~ 1000 , in the light intensity (23) , the photoelectric according to the output of the conversion element 23 , and a notification means 26 for notifying the intensity of light obtained by the calculation means 25 and calculation means 25 to obtain the intensity of light of the center wavelength 172 relatively .