Device for Coating Specimen for Analyzing by Transmission Electron Microscope and Method for Coating it using the same

摘要

coating unit of specimens for TEM analysis according to the present invention, the vacuum chamber; Specimens for TEM analysis and disposed in a vacuum chamber; Is placed on top of the sample containing the target metal for coating the sample surface, the metal particles are separated from the metal target by the sputtering (sputtering) method is characterized in that the deposit on the sample surface by gravity. ; and coating method of the specimen for TEM analysis according to the present invention, by using a coating apparatus of the specimen for TEM analysis as above, for cutting the sample containing the analysis point to be observed in a predetermined size separately from the wafer stage and; A separate specimen placed in a vacuum chamber, comprising the steps of; A metal target to be coated for the analysis of the sample point and disposing in the vacuum chamber; By a sputtering method by the plasma and the step of removing the metal particles from the metal target; The separated metal particles are characterized in that it comprises a step that is deposited on the surface of the specimen including the analysis point by gravity. And the metal to be coated on the specimen, and platinum (Pt), the thickness of the coating metal on the surface of the specimen is preferably such that the 3 2 to.