Method for forming specimen protecting layer and method for manufacturing transmission electron microscope of specimen for analyzing using the same

摘要

TEM specimens forming a protective film that is applied to prepare a specimen for analysis and transmission electron microscopy (TEM) analysis using the same for specimen manufacturing method is to form a protective film on the entire first specimen having the analysis point on the bevel portion of the wafer by using the cover member in the form of a downwardly open , wherein the second sample having the analysis point on the bevel portion of the wafer after the analysis points are fixed to the stage toward the direction parallel to the stage for supporting the specimen and grinding a fixed specimen on the stage . Therefore, the protective film during the cutting of the first specimen using ultrasonic waves to minimize damage to the analytical point of the bevel portion . In addition, it is easy to observe during the grinding point of the analysis of the second sample .