Scan probes - microscope for the determination of topological or electrical properties of a specimen, as well as a method for the production of a probe head

摘要

A probe body (PB) (1) with a carrier (2) forms an undercut, over which it protrudes in a longitudinal extension of the carrier, which consists of a material that has a mono-crystalline semiconductor as a main component. Two electric conductors (3,4) fit on the PB so as to be electrically separated from each other. An electric field is created between the conductors. An independent claim is also included for a method for producing a probe body etched out of a basic body through anisotropic etching processes.