Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer

摘要

In our contribution we present a technique for characterizing the piezo-driven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is proposed and verified by the experimental results. Finally a guidance for an online or offline correction of the position of the sensor head is presented.