Probe device e.g. scanning probe microscope for e.g. micro-electro-mechanical structure, has extension angled from cantilever and transferring movement of probe head into deflection of cantilever

摘要

The device has a folding flexible cantilever (38), where an end of the cantilever is firmly arranged on a substrate (28). Deflection is detected from a rest position of a free end of the cantilever. A probe head (58) is brought with a structure to be measured into a reciprocal action which effects the deflection of the free end of the cantilever. An extension (48) is provided between the Cantilever and the probe head and is angled from the cantilever and transfers movement of the probe head into the deflection of the cantilever. An independent claim is also included for a measuring device with a probe device.