Method for processing of medium- and long-wave surface shape of work piece e.g., for optical elements, involves eroding modified layers to give work piece modified surface

摘要

A precision processing method, involves a first step in which the surface of the work piece (1) being processed has at least one layer applied to it and a second step where the top-most layer is modified and by means of a plasma support, chemical etching processes with local action are applied by super-positioning of an etching action of a given form. Thirdly, the modified layer(s) and the work piece (1) are etched physically, chemically physically, plasma chemically or wet chemically until the modified layer(s) is eroded.