A low driving-voltage micro scratch drive actuator

• 1. 一种低驱动电压凹面电极静电执行器及制作方法 [P] . 中国专利： CN107188109B . 2019.05.21
• 2. 一种低驱动电压凹面电极静电执行器及制作方法 [P] . 中国专利： CN107188109A . 2017-09-22
• 3. Development of a low driving-voltage micro scratch drive actuator by ultra-low resistivity silicon wafer [P] . 美国专利： US2008157625A1 . 2008-07-03

  机译： 利用超低电阻率硅晶片开发低驱动电压微刮擦驱动执行器

• 4. A low driving-voltage micro scratch drive actuator [P] . 英国专利： GB2445194B . 2010-10-13

  机译： 低驱动电压微刮擦驱动执行器

• 5. Micro scratch drive actuator for development of e.g. scratch drive actuator micro motor, has flange structure design provided at corner of beam-to-plate conjunction, and actuator plate designed with four different length/width ratios [P] . 法国专利： FR2910889A1 . 2008-07-04

  机译： 微型刮擦驱动执行器，用于开发例如刮擦驱动器执行器微型电机，在梁板连接的角处提供法兰结构设计，执行器板设计有四种不同的长宽比

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