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NONVOLATILE MEMORY TRANSISTOR HAVING POLY-SILICON FIN, STACKED NONVOLATILE MEMORY DEVICE HAVING ITS TRANSISTOR, METHOD OF FABRICATING ITS TRANSISTOR, AND METHOD OF FABRICATING ITS DEVICE
NONVOLATILE MEMORY TRANSISTOR HAVING POLY-SILICON FIN, STACKED NONVOLATILE MEMORY DEVICE HAVING ITS TRANSISTOR, METHOD OF FABRICATING ITS TRANSISTOR, AND METHOD OF FABRICATING ITS DEVICE
PROBLEM TO BE SOLVED: To provide a nonvolatile memory transistor having a poly-silicon fin, a stacked nonvolatile memory device having the transistor, a method of fabricating the transistor, and a method of fabricating the device.;SOLUTION: The stacked nonvolatile memory device may include an active fin protruding upward from a semiconductor substrate. At least one first charge storing pattern on a top surface and sidewalls of the active fin may be formed. At least one first control gate line on a top surface of the at least one first charge storing pattern may be formed. The at least one first control gate line may intersect over the active fin. An interlayer dielectric layer may be formed on the at least one first control gate line. A poly-silicon fin may be formed on the interlayer dielectric layer. At least one second charge storing pattern on a top surface and sidewalls of the poly-silicon fin may be formed. At least one second control gate line on a top surface of the at least one second charge storing pattern may be formed, and at least one second control gate line may intersect over the poly-silicon fin.;COPYRIGHT: (C)2008,JPO&INPIT
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