PROCESSING RECIPE OPTIMIZING METHOD FOR SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To make a data processor execute optimization calculation of a processing recipe by a substrate processing device in response to an instruction from a host computer.;SOLUTION: This invention provides a processing recipe optimizing method for a substrate processing system wherein a heat treatment device 100 for executing a process treatment for a to-be-treated substrate based on the predetermined processing recipe, the data processor 400 for executing optimization calculation for the processing recipe, and the host computer 500 are connected with a network 310. The substrate processing device receives the instruction for executing the processing recipe optimizing process from the host computer, and transmits data required for calculation to the data processor to make the processor execute the optimizing calculation for the processing recipe, and, based on the result, updates the processing recipe.;COPYRIGHT: (C)2008,JPO&INPIT