The optical absorption polymer which possesses with the optical absorption polymer and the iteration

摘要

PROBLEM TO BE SOLVED: To obtain an antireflection film which has a good step coverage and a high antireflection effect, does not cause displacement or sublimation of the pigments, is excellent in adhesiveness with its substrate, dry-etching properties, heat resistance and handleability and is able to form a high resolution resist image by using a light absorbing polymer having two repeating units having specific chemical structures. ;SOLUTION: Repeating units are shown in formula I (where in R¹ and R² are each H, an alkyl, carboxyl or another organic group; Ar is an organic coloring group; and n is an integer of not less than 0) and formula II (wherein R³ and R⁴ are each H, an alkyl, carboxyl or another organic group; Y is H, an alkoxy, an alkyl, a halogen, -CN, an alkylcarbonyloxy, imide, carbamoyl, carbonyl, oxycarbonyl or phenyl). This light absorbing polymer is prepared by esterification, using a hydroxy-group-containing compound, of a polymer having a repeating unit of formula III or IV (wherein the same codes are used with formula I) and a repeating unit of formula II.;COPYRIGHT: (C)1999,JPO