Air filter media, air filter, clean room, local clean equipment

摘要

PPROBLEM TO BE SOLVED: To prevent production of organic matter or inorganic matter causing problems in manufacturing semiconductor devices, in an air filter collecting suspended particulate matter in the air. PSOLUTION: A substance having polymer dispersion as a principal component with the copolymer of a hydrophilic monomer and a hydrophobic monomer dispersed in water is used as a binder bonding fibers of the air filter. An organic peroxide is used as the polymerization initiator of the copolymer. By installing the air filter 8 in the downstream side of a chemical filter 7, substantially no organic substance and/or inorganic substance causing problems in manufacturing semiconductor devices can be present in a space 4 in the downstream side of the air filter 8. PCOPYRIGHT: (C)2007,JPO&INPIT