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Method of manufacturing a semiconductor integrated circuit, a program for a computer automated design system, and a semiconductor integrated circuit
Method of manufacturing a semiconductor integrated circuit, a program for a computer automated design system, and a semiconductor integrated circuit
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机译:半导体集成电路的制造方法,计算机自动化设计系统的程序以及半导体集成电路
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摘要
A method for manufacturing a semiconductor integrated circuit uses layout data designed by a sequence of processes. The sequence of processes includes disposing a lower-layer wiring pattern on an imaginary lower-layer wiring layer and an upper-layer wiring pattern perpendicular to the lower-layer wiring pattern on an imaginary upper-layer wiring layer implemented in the graphics image space, providing a detour pattern including a first detour pattern connected to the upper-layer wiring pattern, providing a plurality of via patterns connecting the lower-layer and upper-layer wiring patterns, and forming a via cell pattern.
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