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METHOD OF REGULATING CONCENTRATION OF CHARGE CARRIERS IN PbSnSe ERITAXIAL LAYERS

机译:调节PbSnSe外延层中电荷载流子浓度的方法

摘要

The invention relates to semi-conductors technology and can be used in designing semi-conductor devices, in particular, to highly sensitive infrared photodetector with maximum possible high working temperatures.The inventive feature of the method for regulating concentration of charge carriers in PbSnSe epitaxial layers is characterized in that the source is the PbSnSe alloys in the range of compositions X = 0.04 – 0.12 containing additionally Cr – 0.6 at % or In – 1 at %, using a narrow range of the source temperatures 480-490°C, substrate 390-400°C and additional selenium source 102-104°C.
机译:本发明涉及半导体技术,可用于半导体器件的设计,特别是涉及具有最大可能高工作温度的高灵敏度红外光电探测器。PbSnSe外延层中电荷载流子浓度调节方法的发明特征其特征在于来源是在组成X =0.04≤P的范围内的PbSnSe合金。 0.12还含有Cr- 0.6 at%或In–使用较窄范围的离子源温度480-490°C,底物390-400°C和附加的硒离子源102-104°C达到1 at%。

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