Ag ALLOY REFLECTIVE FILM FOR REFLECTOR, REFLECTOR, AND Ag ALLOY SPUTTERING TARGET FOR FORMATION OF Ag ALLOY REFLECTIVE FILM FOR REFLECTOR

摘要

Disclosed are: an Ag alloy reflective film for use in the formation of a reflector which has a high reflectivity and hardly causes the coagulation of Ag by humidity or heat; a reflector; and an Ag alloy sputtering target for use in the formation of an Ag alloy reflective film for a reflector. (1) Disclosed is an Ag alloy reflective film for a reflector, which comprises Ag as the main ingredient and one or more members selected from Ti, V, Cr, Mn, Mg and W in a total amount of more than 3 atm% and not more than 7 atm%. (2) The Ag alloy reflective film may contain one or more members selected from Au, Pt, Pd and Cu in a total amount of 0.3 to 2 atm%. (3) The Ag alloy reflective film may have a reflectivity as measured with light having a wavelength of 650 nm of 85% or greater. (4) The Ag alloy reflective film may be formed by a sputtering process. (5) Also disclosed is a reflector having the Ag alloy reflective film. (6) Further disclosed is a target for use in the formation of an Ag alloy reflective film.