Ag ALLOY REFLECTION FILM FOR REFLECTOR, REFLECTOR AND Ag ALLOY SPUTTERING TARGET FOR FORMATION OF Ag ALLOY REFLECTION FILM FOR REFLECTOR

摘要

PROBLEM TO BE SOLVED: To provide an Ag alloy reflective film for a reflector having high reflectivity and hardly causing coagulation of Ag by humidity or heat.;SOLUTION: There are provided: (1) the Ag alloy reflective film for a reflector containing Ag as the main ingredient and one or more members selected from Ti, V, Cr, Mn, Mg and W in a total amount of 3 to 7 atomic%; (2) the Ag alloy reflective film may containing one or more members selected from Au, Pt, Pd, Cu in a total amount of 0.3 to 2 atomic%; (3) the Ag alloy reflective film of which a reflectivity as measured with light at a wavelength of 650 nm is ≥85%; (4) the Ag alloy reflective film which is formed by a sputtering process; (5) a reflector having the Ag alloy reflective film; (6) a target or the like for use in the formation of the Ag alloy reflective film.;COPYRIGHT: (C)2008,JPO&INPIT