PACKAGE FOR MICROMACHINED SILICON CONDENSER MICROPHONE

摘要

A microphone is disclosed having a case (512, 514), a motor die (518), and an integrated circuit die (526). The case defines a chamber. The motor die (518) is operably attached to the case within the chamber and partitions the chamber into a first compartment and a second compartment wherein the volume of the first compartment is larger than the volume of the second compartment. Furthermore, the integrated circuit die (526) is housed within the first compartment and operably connected to the motor die (518).