MICRO-DISPLACEMENT MEASURING DEVICE, MICRO-DISPLACEMENT MEASURING METHOD, AND MICRO-DISPLACEMENT MEASURING PROGRAM

摘要

In a micro-displacement measurement utilizing a laser beam, the size reduction and the simple constitution of a measuring device are realized to reduce the loss, which is received by the light from an object till the light reaches an optical detector, thereby to execute a highly reliable measurement. An optical waveguide (4) and a branch waveguide (6) are formed in a plane optical circuit substrate (3), and a semiconductor laser element (2) is also mounted on the plane optical circuit substrate (3), so that a high integration is realized. As a result, the distance for the light from an object (50) to reach the optical waveguide (4) is diminished, and the strength for the disturbances such as thermal expansions or vibrations is attained, so that the loss to be received by the measuring light can be reduced to bring highly reliable measurement results.