PROBLEM TO BE SOLVED: To provide a compact and low-cost micro-displacement measuring device.;SOLUTION: In this micro-displacement measuring device, emitted light from two optical fibers is allowed to interfere, and micro-displacement is detected based on the phase shift quantity caused by the micro-displacement of a measuring object. The device is provided with a substrate for optical component array forming thereon a V-shaped groove 11a for holding a collimator lens 24 for converting laser light into parallel light, a U-shaped groove 12 for holding the first beam splitter 50 for branching the parallel light into reflected light and transmitted light and the second beam splitter 60 for totally reflecting light reflected by the measuring object 117 and returned, and V-shaped grooves 11b, 11c for holding the second and third collimator lenses 34, 44 for converging emitted light from the first and second beam splitters 50, 60. In the device, prescribed optical components are inserted precisely into each groove, and thereby assembly is facilitated, and manufacturing cost is reduced by dispensing with an optical axis adjustment work.;COPYRIGHT: (C)2005,JPO&NCIPI
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