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GRATING MEASURING MODULE AND MICRO-DISPLACEMENT MEASUREMENT DEVICE

机译:光栅测量模块和微位移测量装置

摘要

A grating measuring module includes a light source, a collimating device, a first grating, a second grating, and an image sensing chip. The first grating is arranged on an optical path of the collimating device and the second grating is arranged on an optical path of the first grating. Each of the two gratings comprises a first pattern and a plurality of second patterns locating at the both sides of the first pattern. The first and second gratings can each be attached to an object which may be displaced in relation to another object, so allowing light of a certain pattern to pass depending on the magnitude of the displacement. The image sensing chip arranged on an optical path from the second grating receives light emitted from the light source and forms an image from which a displacement can be calculated and displayed.
机译:光栅测量模块包括光源,准直装置,第一光栅,第二光栅和图像传感芯片。 第一光栅布置在准直装置的光路上,并且第二光栅布置在第一光栅的光路上。 两个光栅中的每一个包括第一图案和定位在第一图案的两侧的多个第二图案。 第一和第二光栅各自附接到可以与另一个物体相对于另一个物体移位的物体,因此允许某个图案的光根据位移的大小来通过。 布置在来自第二光栅的光路上的图像感测芯片接收从光源发射的光并形成可以计算和显示位移的图像。

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