首页> 外国专利> TREATING A GERMANIUM LAYER BONDED TO A SUBSTRATE

TREATING A GERMANIUM LAYER BONDED TO A SUBSTRATE

机译:处理结合到基质上的锗层

摘要

The invention concerns a method for treating a structure comprising a thin Ge layer on a substrate, said layer having been previously bonded to the substrate, the method including a treatment for improving the electrical properties of the layer and/or of the interface of the Ge layer with the underlying layer. The invention is characterized in that said treatment is a heat treatment implemented at a temperature ranging between 500°C and 600°C for a maximum of 3 hours. The invention also concerns a method for producing a structure comprising a Ge layer, the method including bonding a donor substrate comprising at least in its upper part a thin Ge layer and a receiver substrate, characterized in that it includes the following steps: (a) bonding the donor substrate to the receiver substrate such that the Ge layer is located in the neighborhood of the bonding interface; (b) eliminating part of the donor substrate not including the Ge layer; (c) treating the structure comprising the receiver substrate and the Ge layer in accordance with the treatment method.
机译:本发明涉及一种用于处理在衬底上包括薄Ge层的结构的方法,所述层已经预先结合到衬底上,该方法包括用于改善该层和/或Ge的界面的电性能的处理。底层和底层。本发明的特征在于,所述处理是在500℃至600℃之间的温度下进行的最多3小时的热处理。本发明还涉及一种用于制造包括Ge层的结构的方法,该方法包括将至少在其上部包括薄Ge层的施主衬底与受主衬底接合,其特征在于,该施主衬底包括以下步骤:(a)将供体衬底结合到受体衬底上,使得Ge层位于结合界面附近; (b)去除不包括Ge层的供体衬底的一部分; (c)根据处理方法处理包括接收体衬底和Ge层的结构。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号