HIGH SENSITIVE INTERFEROMETER TYPE SENSOR HAVING SINGLE MODE OPTICAL WAVEGUIDE AND THE FABRICATION METHOD THEREOF, METHOD FOR FABRICATING SINGLE MODE OPTICAL WAVEGUIDE

摘要

A high sensitive interferometer type sensor having a single mode optical waveguide and a manufacturing method thereof, a method for manufacturing the single mode optical waveguide are provided to easily couple the interferometer type sensor with an optical fiber or optical measuring equipment by forming an optical fiber coupling unit in a curved groove shape. A high sensitive interferometer type sensor(100) includes a single mode optical waveguide(110) and a sensing unit(120). The single mode optical waveguide has a core(112) and a cladding. The core has at least two interferometer arms and a minimum thickness of 1mum. The cladding surrounds the core. The sensing unit is formed by opening a part of the cladding to expose a part of at least one of the interferometer arms. The cladding is composed of upper and lower claddings(111,113). A self-assembled monolayer is formed at the exposed part of the interferometer arm.