SUSCEPTOR OF USING SEMICONDUCTOR PROCESS EQUIPMENT AND SEMICONDUCTOR PROCESS EQUIPMENT HAVING THEROF

摘要

the present invention is a liquid crystal display device or a semiconductor manufacturing process in the manufacturing process using the CVD chamber or a PECVD chamber is used , etc. a susceptor that is used in a semiconductor process chamber is disclosed for preventing the disconnection of the susceptor to the heater . The invention disclosed semiconductor process equipment susceptor , a showerhead , which supplies a gas , according to the semiconductor process equipment with a susceptor that corresponds to the shower head , the heater for heating the susceptor up and power to the heater lead exposed to the outside to supply ; Heating wire connected to said lead ; System formed to surround the heating wire; Ceramic material filled inside the sheath ; To and including the blocking layer formed on the ends of the system .