Semiconductor manufacturing equipment for ceramics susceptor treatment object holder, and processing equipment

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable holder of an article being processed, a processing unit and a ceramic susceptor for semiconductor manufacturing device.;SOLUTION: The holder 12 of an article being processed comprises a ceramic basic body 13 having electric circuits 3a, 3b, 14 and 15 and provided with screw holes, anchor members 22 and 25 screwed fixedly into the screw holes of the ceramic basic body 13, and power supply conductive members 4, 17 and 18 connected electrically with the electric circuits 3a, 3b, 14 and 15.;COPYRIGHT: (C)2003,JPO