ULTRA HYDROPHILIC Ti-O-C BASED NANO FILM AND FABRICATION METHOD THEREOF

摘要

Ti precursor to a boiling point lower volatility by mixing a good liquid at a constant rate deposition thickness is improved and the deposition uniformity is also excellent ultra-hydrophilic Ti-OC -based nano- thin film was prepared . The catalyst promotes the vaporization of the Ti precursor and a Ti precursor easily improves the efficiency of plasma polymerization by being injected into the reaction chamber .