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Ultra hydrophilic Ti-O-C based nano film and fabrication method thereof
Ultra hydrophilic Ti-O-C based nano film and fabrication method thereof
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机译:超亲水性Ti-O-C基纳米薄膜及其制备方法
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摘要
An ultra-hydrophilic Ti—O—C based nano-film of which deposition thickness was improved and deposition uniformity was excellent was fabricated by mixing a Ti precursor and a liquid having a low boiling point and a high volatility—at a uniform ratio. The catalyst accelerates a vaporization of the Ti precursor and facilitates the Ti precursor to be injected into a reaction chamber, thereby improving plasma polymerization efficiency.
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