IMPROVED CAPACITIVE BASED PRESSURE SENSOR DESIGN

摘要

The pressure transducer assembly of the present invention includes a first body, a second body, the diaphragm and the electrode. The diaphragm is disposed between the first body and the second body. The first body and the diaphragm forms a first chamber. A second body with the diaphragm forms a second chamber. Electrode is disposed in the first chamber. A portion of the diaphragm is further in response to the pressure of the high first chamber bent in a first direction, in response to a further pressure of the high second chamber than the pressure in the first chamber in the opposite direction of the first direction than the pressure of the second chamber the hwinda in two directions. The capacitance between the electrode and the membrane represents the difference between the first chamber and the second chamber pressure. In certain embodiments, the electrode is suspended from the hub-and-spoke mounting. In some embodiments, the electrode is all metal. In another embodiment, the electrode comprises a ceramic green sheet, which is a conductive film formed thereon, the disc is coupled to a housing comprising a ceramic rod. In certain embodiments, in order to reduce the twisting in response to changes in temperature, converter also also has a low coefficient of thermal expansion member connected to the housing member.