capacitive sensors; microsensors; pressure sensors; MEMS based capacitive differential pressure sensor; body forming technique; capacitive sensitivity; diaphragm thickness; input pressure variations; linear region; microelectromechanical systems based capacitive differential pressure sensor; parasitic effects; temperature drift; Capacitors; Electrodes; Equations; Linearity; Mathematical model; Micromechanical devices; Sensitivity; Linearity; MEMS; Pressure Sensor; Sensitivity;
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机译:用于风洞应用的仪器级差分电容MEMS切应力传感器系统。
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机译:MEMS电容式压力传感器粘弹性圆形隔膜的动态分析使用改进的差分变换方法