DRIVE CONTROL METHOD FOR ACTUATOR AND DRIVING DEVICE, DRIVING DEVICE, DELIVERY CONTROL METHOD FOR LIQUID DROPLET DELIVERY HEAD AND LIQUID DROPLET DELIVERY DEVICE, AND LIQUID DROPLET DELIVERY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method or the like can drive-control independently each actuator in a driving device, by simple control of a drive control circuit.;SOLUTION: This drive control method for the actuator for a liquid droplet delivery head or the like is provided with an individual electrode 12 serving as a fixed electrode, and a diaphragm 22 opposed to the individual electrode 12 with a distance, having a piezoelectric film 23 comprising a material having a relative dielectric constant higher than that of silicon oxide, in a side opposed to the individual electrode 12, and serving as a movable electrode, and the drive control method includes a process for selecting either of a first voltage for bringing the diaphragm 22 into contact with the individual electrode 12, by a pressure concerning a distortion of the piezoelectric film 23 and an electrostatic pressure generated between the individual electrode 12 and the diaphragm 22, or a second voltage for displacing the diaphragm 22 not to be brought into contact with the individual electrode 12, and a process for impressing a voltage concerning the selection between the diaphragm 22 and the individual electrode 12, to operate the diaphragm 22.;COPYRIGHT: (C)2009,JPO&INPIT