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ELECTRODE SUBSTRATE, ELECTROSTATIC ACTUATOR, DROPLET DELIVERY HEAD, DROPLET DELIVERY DEVICE, ELECTROSTATIC DRIVING DEVICE, AND MANUFACTURING METHODS FOR THEM
ELECTRODE SUBSTRATE, ELECTROSTATIC ACTUATOR, DROPLET DELIVERY HEAD, DROPLET DELIVERY DEVICE, ELECTROSTATIC DRIVING DEVICE, AND MANUFACTURING METHODS FOR THEM
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机译:电极基材,静电致动器,液滴输送头,液滴输送装置,静电驱动装置及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide an electrode substrate arranged so as to assure a larger facing area against a driven part and individual electrode, its manufacturing method, an electrostatic actuator using the electrode substrate and a droplet delivery head.;SOLUTION: The manufacturing methods at least comprise a process of forming the mask of a chromium film 31 for forming a grooved part 8 on the substrate surface, a process of etching a glass substrate 30 and forming the grooved part 8 aligned with the opening of the mask of the chromium film 31, a process of forming a ITO33 film used as conductive material on the whole surface provided with the grooved part 8, a process of forming a resist 35 in the grooved part 8 and eliminating the ITO film formed on the part other than the grooved part 8, a process of eliminating the mask of the chromium film 31, and a process of eliminating the resist 35.;COPYRIGHT: (C)2006,JPO&NCIPI
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