METHOD FOR ELECTRONIC BEAM DRAWING, MICROSCOPIC PATTERN DRAWING SYSTEM, METHOD FOR MANUFACTURING CONCAVE-CONVEX PATTERN SUPPORTER, AND METHOD FOR MANUFACTURING MAGNETIC DISK MEDIUM

摘要

PPROBLEM TO BE SOLVED: To draw a long element corresponding to two-bit signal length of a microscopic pattern formed on a magnetic disk medium without making a gap in the central part with high accuracy and at high speed. PSOLUTION: Drawing the long element 14 is done by scanning in such a way that the central part of the two-bit signal length 2kT is taken as a central position s and a range in which a drawing length gets shortened by a predetermined ratio is filled and by leaving a non-drawing part with a predetermined width in both sides for the two-bit signal length 2T final on the magnetic recording medium when drawing by rotating a substrate 10 with a resist 11 applied in one direction, and executing X-Y deflection while reciprocating the electronic beam EB at high speed in the X direction perpendicular to the radius direction Y of the substrate 10. PCOPYRIGHT: (C)2009,JPO&INPIT