ELECTRON BEAM DRAWING METHOD, FINE PATTERN DRAWING SYSTEM, METHOD FOR MANUFACTURING UNEVEN PATTERN CARRIER, AND METHOD FOR MANUFACTURING MAGNETIC DISK MEDIUM

摘要

PROBLEM TO BE SOLVED: To improve accuracy of a starting position of drawing in a circumference direction in each position in a radial direction of each region when a hard disk pattern is drawn by electron beam scanning, the hard disk pattern including a plurality of servo regions and data regions between the servo regions in an arc form provided from the center side to the outside of the disk.;SOLUTION: When the hard disk pattern is drawn by scanning an electron beam on a substrate coated with a resist while rotating a rotation stage, drawing is started in each position in a radial direction of each region 12A, 12B, 12C, ..., after each predetermined time referring to an encoder pulse preliminarily determined in each position in the radial direction, wherein the reference encoder pulse is, among encoder pulses A1, A2, A3, ... generated according to rotation angles, at a rear position of a predetermined encoder pulse generated in a front side along the rotation direction of a position in the radial direction where the starting position of drawing in a circumference direction within the each region reaches first at the drawing position while the rotation stage is rotated, as well as at a front side of the starting position of drawing in the circumference direction in each position in the radial direction.;COPYRIGHT: (C)2009,JPO&INPIT