FILM-DEPOSITING METHOD OF ANTIREFLECTION LAYER PROVIDED WITH ANTIFOULING LAYER AND FILM-DEPOSITING DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a film-depositing method of an antireflection layer which is provided with an antifouling layer excellent in endurance on the antireflection layer of an optical element without damaging visibility, and to provide a device for performing the film-deposition.;SOLUTION: The film-depositing method of antireflection layer is characterized in that the antireflection layer is formed on a substrate and a polytetrafluoroethylene film having a thickness of 10 nm or less is laminated on the antireflection layer as an antifouling layer according to a CVD method.;COPYRIGHT: (C)2009,JPO&INPIT